Linear Actuators CITIZEN MICRO/CITIZEN CHIBA PRECISION/CITIZEN ELECTRONICS

Applications for;
Semiconductor manufacturing equipment
Optical equipment and exposure systems
Inspection and measurement equipment
Laboratory and research instruments
Cleanroom-compatible equipment

Target for;
Design and development engineers at semiconductor and optical equipment manufacturers
Developers of research and experimental equipment requiring high-precision positioning
FA and equipment manufacturers looking to integrate compact, lightweight linear actuators
Designers of equipment used in cleanroom environments

Applications requiring high-precision positioning with short strokes
Inspection and measurement processes where repeatability and reproducibility are critical
Precision adjustment axes in optical systems and semiconductor processes
Equipment used in clean environments requiring particle generation control

1. Compact, Lightweight, High-Precision AC Servo Linear Actuator
This linear actuator combines a hollow-shaft AC servo motor with a compact, high-resolution optical rotary encoder.
Its direct-drive, gearless design enables high resolution and highly accurate positioning.

2. Series Variations to Meet Different Application Needs
The product lineup includes cost-effective models that maintain high precision, long-life types, and cleanroom-compatible models with particle suppression.
Custom configurations are also available to meet specific application requirements.

3. Compact Design Supporting Space-Saving Equipment Layouts
By integrating the linear drive mechanism into a single unit, the actuator simplifies internal equipment layouts.
This contributes to space-saving designs while maintaining high performance.

4. High Suitability for Clean Environments and Precision Applications
The lineup includes cleanroom-compatible models, making the actuator suitable for equipment used in optical and semiconductor applications where high cleanliness and stable operation are required.